Research progress and applications of high-power pulsed magnetron sputtering technology and its hybrid techniques

High-power pulsed magnetron sputtering is a novel, advanced physical vapor deposition (PVD) technique. With advantages such as high sputtering ionization rates, dense and uniform coatings, and strong substrate-coating adhesion, it shows great promise for applications in the field of cutting tool coatings. This paper outlines the basic principles and core advantages of high-power pulsed magnetron sputtering technology and systematically analyzes the challenges encountered in industrial applications, including low deposition rates, insufficient ionization of certain target materials, and high coating stress. This paper focuses on reviewing the hybrid forms of high-power pulsed magnetron sputtering combined with direct-current magnetron sputtering, radio-frequency magnetron sputtering, medium-frequency magnetron sputtering, and arc ion plating, elucidating the synergistic mechanisms and performance enhancement effects of these hybrid technologies. Focusing on tool coatings, this paper provides a detailed introduction to the current applications of high-power pulsed magnetron sputtering and its hybrid technologies in the preparation of hard coatings and wear-resistant coatings, and analyzes their role in improving the cutting performance and service life of cutting tools. Finally, the paper summarizes the shortcomings in current technological development and outlines future research directions and prospects for industrial applications.